SHANGHAI ROYAL TECHNOLOGY INC.
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Indium-Tin-Oxide Coating, ITO-Coatings on High Quality PET Substrates, ITO Think Film Vacuum Coating Equipment
PET ITO Thin Film Vacuum Coating Equipment is with the magentron sputtering technology to generate high transparent ITO film on glass and PET materials.
PET ITO Thin Film Vacuum Coating Equipment Standard applications: PET, high quality glass substrate. Like eletronic display, ITO coated microscope slide, Transparent shielding glass, conducting glass, defrosting film, De-icing film coating,
PET ITO Thin Film Vacuum Coating Equipment Configurations:
1) DC Sputtering Sources: Cu, Al, ITO
2) MF Sputtering Sources
3) Turbo Molecular pump + Backing Pump group
4) High-intensity magnetic field to improve ITO film quality, target utilization rate >30%
5) Cu, Al, Si targets utilization rate > 35%
6) Deposition Rate: 30nm m/min ~ 40nm m/min
7) Sputtering Uniformity Area: 350mm
PET ITO Thin Film Vacuum Coating Equipment Standard Specifications
| Model | Size(mm) | Substrate Jigs (Qty.) | Sputtering Power(kVA) | Sputtering Targets (Qty.) | Sputtering Cathode | MFC | Remark |
| MSC800 | Φ800xH800 | 1 | 2*50 DC | 4 | Cylinder | 3 | ITO coating |
| MSC1616 | Φ1600xH1600 | 6,8 | 2*36 DC | 2 | Rectangular | 2 | 2-door |
PET ITO Thin Film Vacuum Coating Equipment Coating Samples
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.