SHANGHAI ROYAL TECHNOLOGY INC.
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Experimental Magnetron Sputtering Coating Unit / Vertical Portable Small Size Sputtering Coating Machine
Royal Technology has designed and provided various of Ultra-High-Vacuum coating systems for college teaching and scientific research and development, to study various different film growth, generates more innovative NANO thin films are applied with our commercial industries. Our customers like: Shanghai University of China, Machanster University of UK, Beijing Scientific University etc.
Experimental Theraml Evaporation Vacuum Coating Units: With the resistance thermal evaporation coating and Electron -Beam Gun evaporation techniques, to generate conductive films, thin film of semi-conductor, optical thin film and scanning electron microscope (SEM). Optional Devices like: Ion source or hall Ion source units for plasma cleaning pre-treatment, Plasma assisted deposition can generate high quality of metal films, composite film, organic films etc.Fully satisfy the R&D application. Its flexible design and multiple deposition sources are welcomed by the researchers.
Experimetal Magnetron Sputtering Vacuum Coating Units: DC, MF, RF sputtering cathodes for R&D purpose can get monolayer, dielectric film, compound film, semiconductor, multiple layers, composite film, and dielectric films etc
Experimetal Magnetron Sputtering Vacuum Coating Units Technical Performance:
1 Ultimate Vacuum Pressure: better than 5.0×10-6 Torr.
2. Operating Vacuum Pressure: 1.0×10-4 Torr.
3. Pumpingdown Time: from 1 atm to 1.0×10-4 Torr≤ 3 minutes ( room temperature, dry, clean and empty chamber)
4. Metalizing material (sputtering ) Al, Cr, Sn, Ti, SS, Cu… etc.
5. Operating Model: Full Automatically /Semi-Auto/ Manually
Experimetal Magnetron Sputtering Vacuum Coating Units Structure
1. Vacuum Chamber
2. Rouhging Vacuum Pumping System (Backing Pump Package)
3. High Vacuum Pumping System (Diffusion Pump)
4. Electrical Control and Operation System
5. Auxiliarry Facility System (Sub System)
6. Deposition System
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.